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期刊High-aspect-ratio nanoimprint process chains
《微系统与纳米工程(英文)》2017年第1期221-232,共12页Víctor J.Cadarso Nachiappan Chidambaram Loïc Jacot-Descombes Helmut Schift 
This work is partially funded by the Swiss National Science Foundation(SNF)Ambizione project(no.PZ00P2_142511)granted to VJC.
Different methods capable of developing complex structures and building elements with high-aspect-ratio nanostructures combined with microstructures,which are of interest in nanophotonics,are presented.As originals fo...显示全部
关键词:cryo-etching direct 6 write laser lithography high aspect ratio moulding nanoimprint lithography ORMOCER photonic nanofences 2-photon polymerization 
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